Particle-free UHV gate valve

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n this New Products Update we feature a range of items, from valves to cryocoolers, some of which will be featured at SEMICON West. Malvern's Kindest Cut Malvern Instruments, Malvern, UK, displayed its range of low-speed diamond saws at this year's Micro 92 exhibition. The Microslice saws use annular or peripheral blades to produce "unsurpassed results in terms of flatness, parallelism and thiness of section". hard, soft, fragile and other materials can be cut without damage, providing an excellent starting point for high quality polishing. • Contact: David Parsons, Malvern I n s t r u m e n t s Ltd., tel~fax: [44] (0) 684 892456 / 892789. Particle-free

UHV gate v a l v e . F o r applications, requiring an ultra-clean particle-free vacuum gate valve with a high service lifetime, VAT is offering its new Series 15 MONOVAT Valve. Featuring a patented MONOVAT sealing design with only one moving part in vacuum, sources of particles such as cams, bushings and bearings are eliminated. Benefits included particle-free operation and a fast closing time without shock. Using a bellows stem seal, metal bonnet seal and stainless steel construction the valve is completely bakeable to 200°C, usable from atmosphere to UHV, and built with ISO,

~.'1-, or custom llangeb VAT is building a new iactory in the west Japanese city of Ako. With a floor space of 14 300 sq ft it will accommodate to clean rooms. This new facility will serve as customer support and service centre for the Kansai and Kyushu area. Together with the present support and service centre of SKK Vacuum Engineering Ltd in Yokohama this will provide total support over the whole of Japan. ~Contact." RG White, tel~fax." [44] (0)81 346 1999/343 1104. FEI C o - d e v e l o p s FIB m i l l i n g / SEM.The Systems Division of FEI Co., Beaverton, OR, USA, has signed Philips Analytical of Eindhoven, The Netherlands, to a joint developmentcontract that will lead to the production of a new class of microsurgical tools for IC. These new tools will integrate the micromachining and microdeposition capabilities of FEI company's focused ion beam (FIB) workstations with the imaging capabilities of an SEMquality electron beam - in an automated operating environment. The new FIB/SEM workstations will improve upon the capabilities and efficiency of current-generation FIB workstations in support of sub0.5 p.m manufacturing processes and device architectures. llContact: Phil b~sher, FEL Tel~ fax: [1/ (503) 690 1500 / 1509.

Malvern's Microslice diamond saws.

t~arrier Unveils

New Cryocooler Carrier Corp., Farmington, CN, has unveiled a cryogenic cooler capable of chilling advanced electronics and s u p e r c o n d u c t o r s to minus 321F which it fits in a standard-sized electronics cabinet. "We believe our product is a marked advance in cryogenic cooling technology," said Karl J. Krapek, Chairman, President and CEO of Carrier Corporation. "This cryocooler is safe and reliable, and will open up a whole new industry for Carrier. "By pushing industry standards, recognizing emerging technologies, and forging working relationships with potential users of this product, Carrier is providing the leadership needed to successfully bring cryogenics to the marketplace," Krapek said. Carrier's cryocooler has been in the development stages since 1989, but the company has kept the project quiet because it wanted to be sure the unit surpassed industry reliability requirements and will be adaptable to practical use. The cryocooler uses a Stirling cycle compressor which uses helium as its refrigerant, rather than chlorofluorocarbons. Krapek credited Carrier's parent company, United Technologies, for stlpporting the development of the cryocooler. The high technology project cost millions to develop, he said. The cryocooler will allow superconductivity - the loss of resistance to electricity flow - to be economically and reliably applied to enhance the performance of computers, electronics, transportation and communications systems, medical instrumentation, and space and defense products. Carrier has identified the computer and defense industries as the most immediate and largest markets for the cryocooler, but believes there will be many other uses for the product beyond those initially defined. The computer industry has been targeted because computer speed doubles when CMOS (complimentary metal oxide semiconductor chips are cooled to -321 Fahrenheit. The cooled chips have also been found to be more reliable. The Carrier cryocooler has demonstrated a cooling capacity of 250W. It has been designed to achieve a life-

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The Report includes features on the Properties, Production, C o n s u m p t i o n , Markets and Applications for the following materials: If you are involved in electronics for aerospace, military, computing or other high-tech industries, you need to know which materials meet the specialist demands of these industries. Now you can find this information in a new market research study from M I T C H E L L MARKET REPORTS. The Report covers the development of materials in These materials and the technologies and response to the many changes in the electronics changing markets axe covered in this new study industry such as the demands for greater speed, 'ADVANCED INORGANICS FOR packaging density and reliability of ICs and the ELECTRONICS SUBSTRATES & projected growth of gallium arsenide as a PACKAGES '' replacement for silicon. For further information, please contact Kevin Partridge Tel. (+44) (0)863 512242 or fax. (+44+ (0)865 310981 or write to the address below. !

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Caroline Thomas,

Elsevier Advanced Technology, 256 Banbury Road, Oxford, OX2 7DH, UK. Tel. (+44) (0)865 512242, or Fax (+44) (0)865 310981 I

For Information Circle 235

THOMAS

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EI.SEVIER ADVANCED TECIINOLOGY I

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time of 50,000 hours, with a Mean Time Between Failures of 200,000 hours. These performance specifications are the best of any cryocoOler system on the market. The machine is also quiet enough to operate in an office, where it will blend in as background noise. • Contact: Jon Sandberg, UTC, tel: [1] (203) 674 3132. Bio-Rad HL5500 Hall Effect Meas u r e m e n t 'System. The Bio-Rad

HL5500 is a turn-key, high performance Hall system for the measurement of resistivity, carrier concentration and mobility in semiconductors. Modular in concept, allowing easy upgrade paths, the system is suitable for a wide variety of materials, including compound semiconductors. It has low and high resistivity measurement capabilities, with optional cryostats, coupled to a compact, benchtop design. Both van der Pauw and Hall bar measurements can be performed in either AC or DC modes. To complement the new HL5500 Hall Effect Measurement System, Bio-Rad now offers a dedicated liquid nitrogen cryostat, the HL5550. Using a horizontal, continuous-flow design the cryostat fits neatly between the pole pieces of the HL5500 system's magnet and has a viewing window through which a stereo microscope may be used to locate the cryostat's probes on to the sample contacts. • Contact: Steven Blight, Bio-Rad Microscience Ltd., Tel~fax: [44] (0) 442 232552 / 234434.

ber that greatly reduces secondary wall recombination and sputter contamination of the substrate. The resulting output is an easily controlled, highly dense and extremely uniform plasma a low energy levels. Applications include low-damage etching/cleaning of photoresist and other polymers, silicon, and III-V materials; or ECR PECVD of SiO> silicon nitride, and many other materials. The plasma source is completely self-contained and may be installed on any vacuum chamber with a mating flange. The source is suitable for processing substrates up to 8-in (200 mm) in diameter in production or R&D. • Contact: Daniel A. Goodman, Wavemat Inc., tel/fax: [1] (313) 454 0 0 2 0 / 0026. New Micromass 386 RGA at SEMICON West Fisons Instruments / VG

Quadrupoles, Middlewich, UK, is to demonstrate the new Micromass 386 residual gas analyser at Semicon West (Stand 2001/2002) this year. Micromass 386 follows the successful Micromass PC and has been developed to meet the growing demands of industry and R&D, offering faster data, better performance and minimal maintenance. Feature sof the

umt include a powerful 386 microprocessor (with capability for future upgrading to a 486) and super VGA graphics screen, easing interpretation of data, and providing excellent overall presentation. The Micromass 386 can be built into many systems: Ultratrace-S for sputtering; Ultratrace-C for CVD and Ultratrace-M for MOVPE • Contact: Jenny Norton, lAb' plc, tel: [44] (0) 625 434343~

p l e a s e note: This section of III-Vs Review is a showcase for new products across the whole spectrum of application to compound semiconductor technology. If you would like have your product featured in future issues please fax a line to the Editor - [44] (0)865 310981. Our deadlines for the next two issues are: June 20th and August 10th. Readers please note: New Products Update is a reader service so we would appreciate your mentioning that you read about it in III-Vs Review when you make enquiries on the items featured above. Thanks. Companies

Wavemat M o d e l MPDR 325i Advanced ECR Plasma Source.

Wavemat Inc., Plymouth, MI, USA, has announced the availability of the MPDR 325i, 25cm ECR microwave plasma source. The unique design of this patented plasma source eliminates problems inherent with conventional divergent-field ECR plasma sources. The MPDR 325i features computerdesigned magnet configuration with very low magnetic fields outside the plasma source; internal tuning of resonant cavity that eliminates waveguide tuning; permanent magnets that avoid bulky electromagnet power supplies; and a quartz plasma chain-

Micromass 386 RGA from Fisons Instruments/VG Quadrupoles.