Titanium target for sputtering

Titanium target for sputtering

TITANIUM SPUTTERING ous coating composition including 1.0 x 10P6 M and 2.0 M of dissolved Group IV-A metal ions selected from titanium, zirconium, an...

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TITANIUM SPUTTERING

ous coating composition including 1.0 x 10P6 M and 2.0 M of dissolved Group IV-A metal ions selected from titanium, zirconium, and hafnium alone or in combination; an anion selected from an oxyanion, a nonoxyanion with an absolute charge-to-radius ratio value less than that of fluoride anion, or a combination thereof; sufficient hydrogen ion to maintain the solution below a pH of 5.0; fluoride atoms present in a ratio of zero to two fluoride atoms per Group IV-A metal ion; and water, the process forming a Group IV-A oxide matrix on the surface and then rinsing or drying the coating composition sufficiently to permit any further processing.

TARGET

FOR

U.S. Patent 5,952,086. Sept. 14, 1999 T. Ohnishi, assignors to Sumitomo Sitix of Amagasaki Inc., Tokyo

A titanium sputtering target comprising a titanium target face wherein the target face produces at least one X-ray diffractometer peak that is 1.1 or more times stronger than in a titanium X-ray powder diffraction pattern.

ARTICLE COATING

HAVING

A MULTU.AVER

US. Patent 5,952,111. Sept. 14, 1999 R.W. Sugg et al., assignors to Masco Corp., Taylor, Mich.

An article comprising a substrate having on at least a portion of its surface a multilayered corrosion-

and wear-resistant coating comprising a first layer of semibright nickel; a second layer comprised of bright nickel; a third layer comprised of palladium; a fourth layer comprised of palladium and nickel alloy; a fifth layer comprised of zirconium or titanium; a sixth sandwich layer comprised of layers of titanium or zirconium alternating with layers of zirconium compound selected from the group consisting of zirconium nitride, zirconium carbide, and zirconium carbonitride or titanium compound selected from the group consisting of titanium nitride, titanium carbide, and titanium carbonitride; a seventh layer comprised of zirconium compound selected from the group consisting

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