Trench insulated gate bipolar transistors submitted to high temperature bias stress

Trench insulated gate bipolar transistors submitted to high temperature bias stress

Microelectronics Reliability 45 (2005) 1728–1731 www.elsevier.com/locate/microrel 7UHQFK,QVXODWHG*DWH%LSRODU7UDQVLVWRUV6XEPLWWHGWR+LJK 7HPSHUD...

282KB Sizes 0 Downloads 47 Views

Microelectronics Reliability 45 (2005) 1728–1731 www.elsevier.com/locate/microrel

7UHQFK,QVXODWHG*DWH%LSRODU7UDQVLVWRUV6XEPLWWHGWR+LJK 7HPSHUDWXUH%LDV6WUHVV &20DwJD+7RXWDK%7DOD,JKLO%%RXGDUW 6LWH8QLYHUVLWDLUH/86$&%3&KHUERXUJ2FWHYLOOH)UDQFH

$EVWUDFW ,Q WKLV ZRUN ZH DQDO\VH WKH EHKDYLRU RI WKH 1RQ 3XQFK 7KURXJK 7UHQFK ,QVXODWHG *DWH %LSRODU 7UDQVLVWRUV VXEPLWWHG WR +LJK 7HPSHUDWXUH *DWH %LDV +7*%  DQG +LJK 7HPSHUDWXUH 5HYHUVH %LDV +75%  VWUHVVHV 7KH HOHFWULFVWUHVVKDVEHHQDFFRPSOLVKHGGXULQJKRXUVDWƒ&ZLWK9&(PD[&ROOHFWRU(PLWWHUELDV +75% DQG ZLWK 9*(  9 RU 9 *DWH %LDV +7*%  7KH UHVXOWV VKRZ WKH HYROXWLRQ RI WKH VWDWLF SDUDPHWHUV DV WKUHVKROG YROWDJH DQG RQVWDWH YROWDJH GURS DQG RI VZLWFKLQJ SDUDPHWHUV 7KH DLP LV WR FRQVWLWXWH D GDWDEDVH DV FRPSOHWH DV SRVVLEOH IRU WKH DQDO\VLV DQG GLDJQRVLV RI IDLOXUH FDXVHV UHODWHG WR WKH VZLWFKLQJ GHYLFHV LQ SRZHU FRQYHUVLRQV\VWHPV Ó 2005 Elsevier Ltd. All rights reserved.

,QWURGXFWLRQ 7KH WUHQFK ,*%7¶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¶V 6RPH UHFHQW DQG LQWHUHVWLQJ VWXGLHVKDYHEHHQSXEOLVKHGRQWKLVVXEMHFWRYHUWKH ODVW\HDUV>@1HYHUWKHOHVVWKHVHVWXGLHVGLGQRW WDNH LQWR DFFRXQW WKH GHYLFH WHFKQRORJ\ DQG ZHUH QRW LQWHUHVWHG LQ WKH YDULRXV SDUDPHWHUV OLQNHG WR WKH VZLWFKLQJ PRGH RSHUDWLRQ 7KH SUHVHQW VWXG\ GHDOVZLWKWKHHIIHFWVRI+7*%DQG+75%VWUHVVHV RQWUHQFK,*%7¶V7KHDLPLVWRFRQVWLWXWHDXVHIXO GDWDEDVHIRUWKHDQDO\VLVDQGGLDJQRVLVRIWKHSRZHU FRQYHUVLRQV\VWHPV

JDWHR[LGHDQGFRQGXFWLYHSRO\VLOLFRQJDWH HOHFWURGH ZKLFK DUH PDGH LQ D GHHS QDUURZ WUHQFK EHORZWKHFKLSVXUIDFH>@

(PLWWHU

1

3

3%DVH

&RUUHVSRQGLQJDXWKRU7HOID[  (PDLODGGUHVVWRXWDK#FKEJXQLFDHQIU

3

3%DVH

*DWH

*DWHR[LGH

026)(7 FKDQQHO

1        'ULIWUHJLRQ

36XEVWUDWH

&ROOHFWRU

'HYLFHV6WUXFWXUHV 7KH WUHQFK ,*%7 LV LOOXVWUDWHG E\ WKH FURVVVHFWLRQ VKRZQLQILJXUH7KLVVWUXFWXUHLVFKDUDFWHUL]HGE\WKH

1

)LJ7UHQFK,*%7FURVVVHFWLRQ 6R WKH YHUWLFDO 026)(7 FKDQQHO LQ WKH WUHQFK ,*%7 LV DQ DGYDQWDJH EHFDXVH WKH VPDOO FKLS DUHD ZKLFKDOORZHGDVXEVWDQWLDOLQFUHDVHLQFHOOGHQVLW\ $QRWKHU DGYDQWDJH LV WKH VXSSUHVVLRQ RI WKH ODWFK XSVXVFHSWLELOLW\>@

0026-2714/$ - see front matter Ó 2005 Elsevier Ltd. All rights reserved. doi:10.1016/j.microrel.2005.07.098

C.O. Maı¨ga et al. / Microelectronics Reliability 45 (2005) 1728–1731

([SHULPHQWV 7KH H[SHULPHQWDO PHDVXUHPHQWV ZHUH FDUULHG RXW XVLQJ &RPPHUFLDO 2II7KH6KHOI &276 ,QVXODWHG *DWH %LSRODU 7UDQVLVWRUV,*:7 9&(PD[ 9 9*(PD[ 9 DQG D PD[LPXP FRQWLQXRXV &ROOHFWRU FXUUHQW ,&PD[ $ DW ƒ& IURP ,QILQHRQ 7HFKQRORJLHV 7KH KLJK WHPSHUDWXUH ELDV VWUHVV KDV EHHQ DFFRPSOLVKHG GXULQJ  KRXUVDWƒ& +75% ZLWK  9&(PD[ &ROOHFWRU ELDV DQG ZLWK *DWHDQG(PLWWHUVKRUWFLUFXLWHG 3RVLWLYH +7*% ZLWK 9*( 9 JDWH ELDV DQG ZLWKFROOHFWRUDQGHPLWWHUVKRUWFLUFXLWHG 1HJDWLYH  +7*% ZLWK 9*( 9 JDWH ELDV DQG ZLWKFROOHFWRUDQGHPLWWHUVKRUWFLUFXLWHG 5HVXOWVDQGGLVFXVVLRQV

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



2Q6WDWH9ROWDJH'URS6KLIW 9

7KH 1RQ 3XQFKWKURXJK WHFKQRORJ\ ZKLFK LV XVHG RIIHUV HDV\ SDUDOOHO VZLWFKLQJ FDSDELOLW\ GXH WR SRVLWLYH WHPSHUDWXUH FRHIILFLHQW LQ 9&( VDW  7KH ODWFKLQJ  FXUUHQW GHQVLW\ RI WKH WUHQFK VWUXFWXUH LV VXSHULRU WR WKDW RI WKH SODQDU VWUXFWXUH 7KH KROH FXUUHQWUHVLVWDQFHZKLFKFDXVHVWKHODWFKXSPDLQO\ GHSHQGV RQ WKH GHSWK RI WKH 1 HPLWWHU UHJLRQ ,Q RUGHUWRUHGXFHWKLVUHVLVWDQFHDVKDOORZ3OD\HULV EXLOWLQLQWKHWUHQFKVWUXFWXUH>@

1729

   

7KH LQLWLDO DQG WKH ILQDO YDOXHV RI WKH GLIIHUHQW ,*%7¶V SDUDPHWHUV DUH UHSRUWHG LQ 7DEOH  )RU HDFK SDUDPHWHU WKH PHDVXUHV  ZHUH FDUULHG RXW E\ XVLQJILYH,*%7¶V

)LJ2QVWDWHYROWDJHGURSVKLIWYHUVXVVWUHVVWLPH

*DWH7KUHVKROG9ROWDJH9WK

6ZLWFKLQJ3DUDPHWHUV

7KH JDWH WKUHVKROG YROWDJH KDV EHHQ GHILQHG DV WKH JDWH YROWDJH 9*( YDOXH PHDVXUHG DW ƒ& DQG FRUUHVSRQGLQJ WR FROOHFWRU FXUUHQW YDOXH ,& —$ ZLWK9&( 9*(>@

7KH H[SHULPHQWDO VHW XS RI PHDVXUHPHQW RI WKH ,*%7¶VVZLWFKLQJSDUDPHWHUVLVVKRZQLQILJXUH







    

/RDG

&ROOHFWRUFXUUHQWL&

*DWHYROWDJHY*

(

'ULYHYROWDJHY'



*DWH7KUHVKROG9ROWDJH6KLIW 9



6WUHVV7LPH KRXUV







')

&ROOHFWRU WR(PLWWHU YROWDJHY&(

 

+7*%9 +7*%9 +75%



*DWH 'ULYH &LUFXLW



5*

'87

5*

*DWH 'ULYH &LUFXLW

3LORWH 'HYLFH

  











3LORW'HYLFH GULYHSXOVHV

   

6WUHVV7LPH KRXUV

)LJ7KUHVKROG9ROWDJHVKLIWYHUVXVVWUHVV WLPH )LJXUHGHSLFWVSRVLWLYHWKUHVKROGYROWDJHVKLIW IRU WKH +75% DQG WKH +7*%9 DQG QHJDWLYH YDULDWLRQ IRU +7*%9 7KLV HIIHFW FDQ EH

'87GULYH SXOVHV

)LJ6ZLWFKLQJWHVWFLUFXLW

,W LV FRQVWLWXWHG E\ D VHULHV FKRSSHU ZLWK LQGXFWLYH ORDG ,Q RUGHU WR FRUUHFWO\ DSSUHKHQG WKH

C.O. Maı¨ga et al. / Microelectronics Reliability 45 (2005) 1728–1731

7XUQ2Q'HOD\7LPHDQG7XUQ2IIGHOD\7LPH 7KHYDULDWLRQRIWXUQRQGHOD\WLPHDQGRIWXUQ RIIGHOD\WLPHRIWKHFROOHFWRUFXUUHQWDUHLOOXVWUDWHG LQ ILJXUH  7KH WXUQRQ GHOD\ WLPH VKLIW LV DOZD\V SRVLWLYH DQG VKRZV PRUH LQFUHDVLQJ LQ WKH FDVH RI +75% VWUHVV WKDQ LQ WKH +7*% VWUHVVHV $OVR WKH WXUQ± RII GHOD\ WLPH VKLIW YDULHV ZLWK D VDPH PDQQHU EXW LW LV PRUH LPSRUWDQW IRU WKH QHJDWLYH +7*%VWUHVV7KHVHYDULDWLRQVFDQEHOLQNHGWRWKH LQWHUHOHFWURGH FDSDFLWDQFHV DQG WR WKH FKDUJH WUDSSLQJ LQ WKH JDWH R[LGH DQG DW WKH LQWHUIDFH R[LGHVHPLFRQGXFWRU>@













 



 +7*%9 +7*%9 +75%

 









6ZLWFKLQJORVVHV )LJXUHH[KLELWVWKHVKLIWRIWKH7XUQRQORVVHV :RQDQGWKH7XUQRIIORVVHV:RIIYHUVXVVWUHVVWLPH 7KHVZLWFKLQJORVVHV:RQDQG:RIILQFUHDVHVIRUWKH WUHQFK ,*%7 GXULQJ WKH SRVLWLYH DQG QHJDWLYH +7*% VWUHVVHV DQG +75% VWUHVV 7KH YDULDWLRQ RI :RQDQG:RIILVHVVHQWLDOO\GXHRQWKHRQHKDQGWR WKH ULVH DQG IDOO WLPH DQG RQ WKH RWKHU KDQG WR WKH YROWDJHVXUJH7KHVHORVVHVVKLIWDUHPRUHLPSRUWDQW IRU WKH QHJDWLYH +7*% VWUHVV WKDQ IRU WKH SRVLWLYH RQHDQGWKH+75%VWUHVV



+7*%9 +7*%9 +75%











7XUQ2II'HOD\7LPH6KLIW Q6

7XUQ2Q'HOD\7LPH6KLIW Q6



DQG +75% VWUHVVHV $V WKH HOHFWULF ILHOGGHQVLW\ LV YHU\ KLJK LQ WKH GULIW UHJLRQ RI  WUHQFK ,*%7 VWUXFWXUH WKH LPSRUWDQW FDUULHU PRELOLW\ GHFUHDVHV GXULQJWKHVWUHVVDQGOHDGVWRLQFUHDVHULVHWLPH>@ 7KHSRVLWLYHVKLIWRIWKHIDOOWLPHFDQEHH[SODLQHG E\ WKH DFFXPXODWLRQ RI VWRUHG FKDUJHV LQ WKH GULIW UHJLRQRIWKHQRQSXQFKWKURXJK7UHQFK,*%7>@



   

6WUHVV7LPH KRXUV



+7*%9 +7*%9 +75%









 



+7*%9 +7*%9 +75%























7XUQ2II/RVVHV6KLIW µ-

VZLWFKLQJ SDUDPHWHUV QR VQXEEHU FLUFXLW KDV EHHQ XVHG DQG WR DYRLG WKH KHDWLQJ RI WKH GHYLFH XQGHU WHVW WKLV RQH LV SXW RQ GXULQJ RQO\ —V SHULRGLFDOO\ DIWHU PV 7KXV WKH FDVH RI WKH GHYLFH UHPDLQV DW WKH VXUURXQGLQJ WHPSHUDWXUH RI ƒ&

7XUQ2Q/RVVHV6KLIW µ-

1730

     

6WUHVV7LPH KRXUV

)LJ7XUQ±2Q'HOD\7LPHDQG7XUQ±2II 'HOD\7LPHVKLIWYHUVXVVWUHVVWLPH

)LJ6ZLWFKLQJORVVHVVKLIWYHUVXVVWUHVVWLPH

5LVH7LPHDQG)DOO7LPH

&RQFOXVLRQ

7KHVKLIWRIWKHULVHWLPHDQGRIWKHIDOOWLPHDUH VKRZQLQILJXUH

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



 +7*%9 +7*%9 +75%

 

5LVH7LPH6KLIW Q6

















 

+7*%9 +7*%9 +75%











)DOO7LPH6KLIW Q6





    

6WUHVV7LPH KRXUV

)LJ5LVH7LPHVKLIWDQG)DOO7LPHVKLIW YHUVXVVWUHVVWLPH 7KH ULVH WLPH LQFUHDVLQJ LV PRUH LPSRUWDQW IRU QHJDWLYH +7*% VWUHVV WKDQ IRU WKH SRVLWLYH +7*%

C.O. Maı¨ga et al. / Microelectronics Reliability 45 (2005) 1728–1731

LPSRUWDQW VWDJH IRU WKH DQDO\VLV RI WKH FRQVHTXHQFHVRIWKHDJHLQJRIWKLVW\SHRIGHYLFHV LQ VWDWLF SRZHU FRQYHUWHUV DQG WKH VHDUFK IRU

1731

SDUDPHWHUVRIIROORZXSXVDEOHIRUWKHGLDJQRVLVRI IDLOXUHFDXVHV

7DEOH 6XPPDU\RI7UHQFKDQG3ODQDU137,*%7SDUDPHWHUV 3ODQDU137,*%7

7UHQFK137,*%7

,QLWLDOYDOXH

3DUDPHWHUV

+7*%

9

9

9WK 9





9&(RQ 9



WGRQ Q6



)LQDOYDOXH

+75%

+7*%

9

9



















6KLIW9DOXH 

+75%

+7*%

+75%

6KLIW9DOXH  +7*%

+75%

9

9









































9 

9 



WU Q6

























WGRII µ6

























WI Q6

























:RQ µ-

























:RII µ-

























$FNQRZOHGJHPHQW 7KLV ZRUN KDV EHHQ FDUULHG RXW ZLWK WKH ILQDQFLDO KHOSRIWKH(XURSHDQ&RPPXQLW\ )('(5 5HIHUHQFHV >@(50RWWR -)'RQORQ +7DNDKDVKL 07DEDWD +,ZDPRWR ³&KDUDFWHULVWLFV RI D 9 37 ,*%7 ZLWK 7UHQFK JDWH DQG /RFDO /LIH 7LPH &RQWURO´ LQ 3URFHHGLQJ RI WKH ,((( ,$6 $QQXDO 0HHWLQJ 2FWREHUSS >@)8GUHD HW$O ³N9 7UHQFK ,QVXODWHG *DWH %LSRODU 7UDQVLVWRUV ,*%7¶V  ZLWK 8OWUDORZ 2Q 5HVLVWDQFH´ ,((( (OHFWURQ 'HYLFH /HWWHUV 9RO 12$XJXVWSS >@+5&KDQJ %-$<$17 %$/,*$ ³9 Q &KDQQHO ,QVXODWHG *DWH %LSRODU 7UDQVLVWRU ZLWK D 7UHQFK *DWH 6WUXFWXUH´ ,((( 7UDQVDFWLRQV RQ (OHFWURQ 'HYLFHV 9RO 12 6HSWHPEHU  SS >@0+DUDGD 70LQDWR +7DNDKDVKL +1LVKLKDUD .,QRXH DQG ,7DNDWD ³9 7UHQFK ,*%7 LQ &RPSDULVRQZLWK3ODQDU,*%7±DQ(YDOXDWLRQRIWKH RIWKH/LPLWVRI,*%73HUIRUPDQFH´LQ3URFHHGLQJV RI,(((,636'0D\SS >@&*RQ]DOH] DQG 5'RZOLQJ ³6ZLWFK DQG ,2 5HOLDELOLW\ UHSRUW´ $SSOLFDWLRQ 1RWHV ,QWHUQDWLRQDO 5HFWLILHU+(;)(70DUFK

>@&20DwJD%7DODLJKLO+7RXWDKDQG%%RXGDUW ³%HKDYLRXU RI 3XQFK7KURXJK DQG 1RQ3XQFK 7KURXJK ,QVXODWHG *DWH %LSRODU 7UDQVLVWRUV 8QGHU +LJK 7HPSHUDWXUH *DWH %LDV 6WUHVV´ LQ 3URFHHGLQJV RI ,((( ,QWHUQDWLRQDO 6\PSRVLXP RQ ,QGXVWULDO (OHFWURQLFV 0D\   $MDFFLR )UDQFH SS >@&20DwJD+7RXWDK%7DODLJKLODQG%%RXGDUW ³&RPSDULVRQ %HWZHHQ WKH %HKDYLRXU RI 3XQFK 7KURXJK DQG 1RQ3XQFK7KURXJK ,QVXODWHG *DWH %LSRODU7UDQVLVWRUV8QGHU+LJK7HPSHUDWXUH5HYHUVH %LDV 6WUHVV´ LQ 0LFURHOHFWURQLF 5HOLDELOLW\ 9RO SS >@07ULYHGL DQG .6KHQDL ³(YDOXDWLRQ RI 3ODQDU DQG 7UHQFK ,*%7 IRU +DUG DQG 6RIW6ZLWFKLQJ 3HUIRUPDQFH´LQ3URFHHGLQJRIWKH,(((,$6$QQXDO 0HHWLQJSS >@53HUUHW³,QWHUUXSWHXUV(OHFWURQLTXHVGH3XLVVDQFH´ +HUPHV6FLHQFH0D\HQQHSS >@6$]]RSDUGL-09LQDVVD(:RLJDUG&K=DUGLQL DQG2%ULDW³$6\VWHPDWLF+DUGDQG6RIW6ZLWFKLQJ 3HUIRUPDQFHV (YDOXDWLRQ RI  9 3XQFKWURXJK ,*%7 6WUXFWXUHV´ ,((( 7UDQVDFWLRQV RQ 3RZHU (OHFWURQLFV 9RO 12 -DQXDU\  SS