00361101/82/01006~04sO3.0/0 Pergamon Press Ltd.
Solid-Stole Ebctronicr Vol. 25, No. I, pp. 63-66. 1982 Printed in Crest Britain
USE OF THE GUMMEL NUMBER IN CALCULATING THE DIFFUSION CURRENT DENSITY IN SCHOTTKY DIODES M. KLEEFSTRA Electrical Engineering Department, Delft University of Technology, Delft, The Netherlands (Receioed 4 March 1981;in revised form 11 May 1981)
Abstract-It is shown that the theories for the diffusion current density in Schottky diodes and in p-n diodes of finite length are equivalent. Writing :he final expression for the diffusion current density in the Schottky diode with the Gummel number as one of the main controlling parameters facilitates their comparison with p-n diodes. As an illustration the theory is applied to a metal-thin p layer-n layer Schottky diode.
The final expressions given for the current density, however, look very different. The diffusion theory for the Schottky diode is commonly given for the simple case of homogeneously doped semiconductor [ 1,2]. Cases of a nonhomogeneously doped semiconductor or the presence of a small layer of opposite doping are left out of consideration. Changes in the bandgap E,, which may be introduced by heavy doping, are not taken into account. Recently majority-carrier diodes of the types metalthin p layer-n layer and n t - thin p layer-n layer have been proposed and partially evaluated [3-71. In principle, such diodes have some advantages: The height of the barrier can be tailored with the aid of the thickness and doping level of the thin p-type layer. There is no imageforce barrier lowering, and because the barrier is not as sharp as in classical Schottky diodes, tunneling will be less likely to occur. It should, of course, be determined to what extent diffusion hampers the thermionic emission current in such diodes. These reasons incited us to consider the diffusion theory in such a way that the presence of a thin p-type layer on the n layer and the transition to the p-n diode are easily accounted for. The assumptions made will be the same as those in the existing theories. The Gummel number of the region which determines the diffusion will prove to be extremely useful.
NOTATION Richardson’s constant electron diffusion coefficient EC conduction band edge EF Fermi level 4 bandgap E” valence band edge JD electron saturation current density according to diffusion theory J” electron current density JT electron saturation current density according to thermionic emission theory NA acceptor impurity concentration ND donor impurity concentration N, effective density of states for electrons T absolute temperature V applied voltage vb, built-in voltage w electrostatic potential W thickness of layer determining electron diffusion d thickness of p-type layer h Planck’s constant Boltzmann’s constant effective mass of electrons n electron density tlf electron densitv times hole densitv_ at eauilibrium . P hole density I 4 absolute magnitude of electronic charge 0th thermal velocity of electrons distance i electric field h mean free path for electrons CL electron mobility PENdistance between conduction band edge and Fermi level at the metal-semiconductor interface App,, increase in barrier height through the presence of a p-type layer A D
Ink”
2.DIFFUSION THEORY FOR SCHO'ITKY DIODESOF ARBITRARY DOPING
In Fig. 1 the electron energy levels are given for a metal-semiconductor structure. The n layer to the right of W is not depleted. The current-voltage characteristic of this structure will be calculated under the following conditions:
LINTRODUCTION
The thermionic emission theory is generally accepted for metal-semiconductor contacts on moderately doped semiconductors where the charge carriers have a high mobility, such as silicon and gallium arsenide. The diffusion theory is applicable foi Schottky diodes on lightly doped semiconductors with a low potential barrier. Both theories have been extensively reviewed by Rhoderick[l]. In the derivation of the diffusion theory for Schottky diodes no reference is made to the theory of the p-n diode of finite length, and vice versa, although the starting equations are the same in both cases.
The recombination-generation rate of charge carriers is infinitely large at point x = 0, the metal-semiconductor interface. The recombination-generation rate of charge carriers is negligibly small between x = 0, and x = IV, The transport of electrons is solely determined by drift and diffusion between points x = 0 and x = IV. 63
64 the “electric
field ~t‘n
Using
the latter
stein
relation
electron
by the electron\”
expre\\ion
(WC’ ,Ippendi\)
D = ICTICI
den\il
current
equal\
and the [
p 10 eliminate
/L yield\
the
:
ii t Multiplying
both member\
integrating current
hole current
is solely
determined
by diffusion
with
relation
constant
applied All
I*. Maxwell-Boitzmann
to the charge these
doping
to the image s = 0 can
When,
no
E,
be
vary
bandgap
where
either
As E,
and
Equation
can be p
(61 gibes
he useful
~ II type diode.
the limit
second
the t‘lect:on
term
numerical
./,, i\ constant
case. between
tlitfusion
current
handgap
&
interface
\,,. Jrn-
and might
in the
the
second = 0
term
then reduces
Schottky
numerator
mu\t
In the cast
in the
and the fr\t
of the already
for
t)pt‘
stated
houndar)
in the
diodes.
The
he r~aluated
c~f constant
numerator
term is e:tjily
just
of a meta-/I
c‘a+e has not been considered theories
calculation.
dE,
a minimum
Thij
diffusion
a maximum
p layer. both under the influence
hecau\e
I0J
when ;I thin highly doped 11 layer i\ prejent
by x,,,, where
reaches
\\i
0 and M’. or in the image foric
Gty for the care of ;I non-constant
existing
ap-
clec[ron
U:
due
a reasonable
in an n layer or ,!I?, reaches
close to the metal in the
or
due to heavy narrowing
into account
used.
betueen
at the metal-semiconductor
the limit x = 0 can be replaced
close to the metal
of the
carriers.
111 is taken
longer
point
be
p ~n1.1
in the
result\
. [‘I(,” + /XI‘ ‘I ),,, (/, ‘rPdkc ~~~~ 1’cl\ I /I
.I,, = yl)
are neglected.
independent
may
however,
force[l,
proximation is the
of charge
of the bandgap
effects.
hold
may
x = 0 and x = I+’ and of whether
is depleted
value
statistics
Edge effects
should
level between
The
X,
carriers.
conditions
not this layer doping
is valid for electrons
the hole densit!
I,‘> l/f
The inlegralion
D = (k’i7q)~
uith
0 to .I - M
to
the right of point x = U’. The Einstein
.r
den\it!
Fig. 1. Electron energy for a Schottky diode uith an applied forward voltage. The dashed line indicate5 the hole quasi-Fermi level. Image force effects are now shoan.
The
from
vanishes
evaluated
h)
bandgap hrcauw
with the aid
conditions,
Equation
(61
to
of the image force. From level
these conditions
for holes
metal
and can be taken
x = W. as was already The now
it follows
is determined
voltage
be derived
from
current
as constant indicated
current
level
between
in the
.K = 0 and
in Fig. I.
characteristic
of the
the equation
giving
diode
can
the electron-
constant
The
total
Dg].
(II
E, the gradients
bandgap
are equal and the electric
in the E, and /?,
field is given
by
y dx
12)
q ds
Maxwell-Boltzmann
statistics
may
be applied
field is then related to the hole density as
9
(3)
pdx
When
the bandgap by a term
is not constant,
the gradient
in E,
dE,/dx from the gradient in E,. and thw
quantity.
iaje[X/
where
way
in the known
N-/I-/I
Because
the Gummel
he relatively
small.
and
the
narrow
number
thermionic
of ;I depleted current
emission
will
/I laqer v ill
density
will he
hr
current
the
The same hold> for transistor\
base[9.
In considering
it ix
number.
the diffusion
mechanism.
a very
tranjijtor
a9 the Gummrl
b’ith
IO].
Schottky
diodes
way.
because
it i\ customary instead
to \hritc
of multiplying
eqn (5) with the hole density /J it i\ multiplied with :I factor e UL.1rl:k r ( where \‘(I) equals the electrostatic hole
[ I, I]. But in the ca\e of ;I Lonctant
density
essentially
p
potential
is proportional
the same operation
of a non-constant differs
I he wnie
\arne
generally
potential
E=kTl!L,
cullrent den\i~).
controlling
in much the
eqn (7) in a different Because
/J d.r I\ the main
appear!
limiting dx
\\
called the ha\e charge or h;rje number.
high
E,_dv_ I~J%_ 1d6,
the electric
I
hole number
factor of the \aturation
density:
.I,, = q[npE+
With
that the quasi-Fermi
by the Fermi
cannot
bandgap
e ““““’
ic performed.
an unambiguous
be defined
can then he conveniently
to
(see .Appendix)
used.
handgap
the
so that In the case electrostatic and eqn Ih)
Gummel’s number and Schottky diodes Finally, some Gummel numbers for metal-n silicon Schottky diodes with homogeneous doping and constant bandgap have been calculated with the abrupt depletion approximation and are given in Fig. 2. Because Gummel numbers increase with increasing forward voltage, diffusion will hamper the thermionic emission current density more and more at high forward voltages. Because the diffusion theory should be applied mostly in cases of a low potential barrier combined with a low doping level case to the metal contact the effect of the image force is small and may often be neglected. So the simple formula (7) can very often be applied. 3.TRANSITIONFROM DIFFUSIONTO THERMIONIC EMISSION
The familiar expression for the thermionic emission saturation current density J7 is: JT =
AT2 e-‘WBN~~~,
(8)
In order to compare the thermionic emission and diffusion current densities, it is convenient to write the expression for the thermionic emission current density in a less conventional way, introducing the substitutions A = 4rqm”k’ h’
(9) (10)
q%N = qv,, - q(E, - EC)
65
and taking to the right of W (Fig. 1) that n = ND yields JT = q
--$&
NDe-qVbilkT
(12)
Taking the approximation of a constant electric field E,,, (in the layer between x = 0 and x = W) which equals the maximum electric field [l, 21 and using our expression (11) makes it possible to give a simple formula for the diffusion saturation current density JD: (13)
The only differences in expressions (12) and (13) are the effective velocities, respectively (u,J~(6~) and pE,,,, at which electrons are crossing the barrier. It is clear then that thermionic emission will limit the current for the case (14)
It can be shown (1) that formula (14) is equivalent to Bethe’s criterion stating that the potential changes at least (kT/q) within the mean free path A. For the thermionic emission theory to be applied, when a more exact criterion than (14) is wanted, a better expression for the diffusion saturation current density, such as the one given by (7), should be used, or
(II)
7
When the Gummel numbers of Fig. 2 are used, it that the ratios (&,,/u&‘(~P) and appears [DnF/Jowp dx]: [NDvl,,/~(6~) emqVbi’kT are equal to within a few percent. This is not surprising because the region where the electric field is close to its maximum gives the main contribution to the Gummel number, as is clear from Fig.
In the case of a diode containing a p layer the Bethe criterion must be changed in its formula as indicated by Shannon[6] so that eqn (14) can no longer be used although eqn (IS) remains valid. To illustrate this case a Schottky diode with a p layer of variable thickness and doping level of NA = 10z3m-’ is considered. The distance pen between conduction band edge and Fermi level at the metal-semiconductor interface is taken as 0.7 V and this value is considered as independent of doping and type. The ratio JdJT and the increase in barrier height (as seen by electrons from the metal side) are plotted in Fig. 3 as a function of d (using the abrupt depletion approximation). Because the Gummel number increases from 2.5 x 10” me2 a+ d = 0 to 1 x 10” mm*at 10ZO 102' lC2' lo= d = 3 x lo-‘m the ratio (JdJT) decreases from 19 to about 5 before the barrier height increases significantly. N, lm-3) The decrease in the ratio (JdJT) corresponds to a decrease in the saturation current density of about 20%, Fig. 2. Gummel numbers for Schottky diodes in homogeneously which is not negligible. At thickness above 8 x lo-’ m the doped semiconductors as a function of donor impurity concentration for different barrierheights with zero applied voltage. p type layer is no longer completely depleted. But only
M. KLEEFSTRA
applied forward voltage, much care is needed to properly describe the I-V characteristics of such diodes.
O,L
4. CONCLUSIONS is shown that the diffusion theory for Schottky diodes and p-n diodes of finite length are equivalent. The use of the Gummel number gives a more compact formula for the diffusion current density. As an illustration it is shown that relatively small amounts of an opposite doping close to the metal contact increase the Gummel number so that the diffusion can hamper the thermionic emission current density. It
0,3
0.2
REFERENCES
0,)
ALPsN 1”)
I 0
-
10 dllO-‘ml
Fig. 3. Ratio Jd/r as a function of the thickness of a p layer on an II layer Schottky diode. NA = 1p3 me3 and No = 10” m-j. The change in barrierheight pBN is also indicated (both for zero
appliedvoltage). above a thickness of 20 x lo-’ m is diffusion the current limiting mechanism. One then has a p type Schottky diode in series with a p-n type junction, where the latter determines the electron current density. Taking a p type layer of 2 x 10-‘m thickness, with NA = 1 x 1022m~3,reduces the ratio at zero applied voltage (JJ&) to 1.6, meaning that the diffusion current density is only slightly higher than the thermionic emission current density. Because both the Gummel number and the barrier height are increasing with increasing
I. E. H. Rhoderick, Mefcll-semiconducror C’mtur’t\. C‘larendorr Press, Oxford (1978). 2. S. M. Sze, Physics of Semiconductor 13uricr.c. W~lr!. Ncu York (1969). 3. J. M. Shannon, Solid-St. Electron. 19. 537 (1976~ 4. A. van der Ziel, Solid-St. Electron. 20, 269 (1977). 5. S. S. Li, Solid-St. Electron. 21, 43.5 (1978). 6. J. M. Shannon. Appl. Phys. Lett. 35.63 (1979). 7. S. S. Li, J. S. Kim and K. L. Wang, IEEE Trcmt. E/rcm~r~ Dee. ED-27, 1310 (1980). X. H. K. Gummel, BeN Spst. Techn. J. 49, I I! ( 19701. 9. P. Rohr. F. A. Lindholm and K. R. .Allen, Solid St. E/rr~rn~r~ 17. 729 (1974). IO. G. Bacarani. C. Jacobini and ,A. M. Mazzonc. .G;o/id-S/ Eiecfron. 20. 5 (1977). II. M. Kleefstra and G. C. Herman. 1. .4ppl. Phy.5. 51. 4421 (1980). 12. N. K. Adam, The Physics und Chemi.ttry of .Surfuw.t. pp 300-307. Oxford University Press. London (I941 I.
APPENDIX When a change in bandgap E, takes place there i\. strictI> speaking, a change in phase, and electrostatic potential differences between two phases are indefinite quantitie\. The only important and measurable quantity in 5uch ca\e\ I, the electrochemical potential or Fermi level. This point is discussed most carefully by Adam1 121 rn III\ chapter on electrical phenomena at interfaces. Equation (5) states then that the electron current densit! I, proportionalto the gradientin the Fermi level of electron\