III-Vs review 1991 epitaxial equipment directory

D I R E C T O R Y .]

III-Vs REVIEW 1991 EPITAXIAL EQUIPMENT DIRECTORY j

LEGEND

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= COMPANY

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= OTHEROFFICES

AFTECH. ADVANCED FURNACE TECHNOLOGY LTD 65 Church End, Cherry Hinton, Cambridge CB1 3LF. UK. • Tel/Fax: [44] 223 24S033/410267. • Paul Tolkien.

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= EQUIPMENT TYPE

MOVPE for llI-V and HTSCs with cold wall, hot wall and rotating substrates.

= PRODUCTS

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= MATERIALS

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= FEATURES

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= SPECIAL FEATURES

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Fully custom only. g III-V & HTSCs.

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All entriescorrect at time of going to press. Companies not yet featured please contact the Editor.

All systems built incorporating customer's ideas with AFTech's engineering and supported by long-term maintenance contracts anywhere in the world. O

Long-established company with international reputation for quality, price and confidentiality. Also manufacture of crystal furnaces and ingot annealing systems. Plus new susceptor bakeout SP2000 product.

AIXTRON GMBH ~]]~ Kackertstr. 15-17, D-5100 Aachen, Germany. • Tel/fax: {49] 241 89090/890940. • Dr Holger Jurgensen.

~ l w AIXTRON provides standard products, customised versions, especially custom-built systems and systems for R&D as well as production. ~IB~ Proven epi systems for GaAs, GaP, InP, ternaries, quaternaries, ZnTe, ZnSe, CdTe, CMT, HTSCs, multicomponent oxides. All systems include: patented zero dead volume ultrafast switching manifold; abrupt i/faces guar; proven standard cell designs; flexibility in wafer from lx2" to 15x4"; gas foil rotation without mech feeds; planetary motion of wafers in multiwafer production; ultimate uniformity & repro; unique stability ctrl system for In handling; flexibility for R&D systems to incl in-situ monitors or custom cell geom. Ot

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j As prev. All include a wide variety of proven epi growth processes from prodn & R&D labs: lasers, FETs, HEMTs, HBTs, detectors, OEICs, SCsl PCs etc. Plus turn-key installations incl gas cab & scrubbers: AIXTOX wet chem scrubber (<5ppb guar).

A$M PO Box 100, 3720 AC Bilthoven, The Netherlands. • Tel/fax: [31] (0) 30 798411/793823. • H. Rouhof.

PMOVPE & LPMOVPE: AIX 202, 200, 200SC, 1002, 2000 & 3000. VPE 1-100 for LEDs & displays. LPE 100 for lasers etc.

ASM France. 74 route de St George d'Orques, 34990 Juvignac, France. Tel/fax: [331 67 454455/405977. Contact: MA Godat.

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MOVPE, silicon epi, VPE.

~ 1 ~ Customised standard products for R&D & production. ~ i 1 ~ Ill-V, ll-VI, HTSC, silicon. O

Moduline concept gas panel, gas flow control, automation.

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~Gas purifiers, scrubbing systems, flow components, customer's spec. semiconductor equipment, supervisory system & simulation tools.

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¢V1" LTD

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MOVPE systems.

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Customised standard products, R&D and production sys-

4/5 Carters Lane, Kiln Farm, Milton Keynes, MK11 3ER UK. Tel/fax: [44] (0)908 563267/568354. • Mr Ferguson.

tems.

~ 1 ~ GaAs, InP, ternaries, quaternaries, II-VIs. O

Aixtron Inc. 9150 SW Pioneer Ct., Suite D1, Wilsonville, OR 97070. USA. Tel/fax: (503) 682 4564/5673. Contact: Mr Terry Lovis.

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Plus others in USA,Japan, Hong Kong, FRG, UK.

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High production through twin reactor design, unparalleled uniformity by unique rotary manifold.

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bTechnical expertise to help solve customer problems; comprehensive back-up service and support.

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