CMOS microcavity arrays for single-cell electroporation and lysis

CMOS microcavity arrays for single-cell electroporation and lysis

Journal Pre-proof CMOS microcavity arrays for single-cell electroporation and lysis Meera Punjiya, André Mocker, Bradley Napier, Arif Zeeshan, Martin ...

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Journal Pre-proof CMOS microcavity arrays for single-cell electroporation and lysis Meera Punjiya, André Mocker, Bradley Napier, Arif Zeeshan, Martin Gutsche, Sameer Sonkusale

PII: DOI: Reference:

S0956-5663(19)31008-5 https://doi.org/10.1016/j.bios.2019.111931 BIOS 111931

To appear in:

Biosensors and Bioelectronics

Received date : 23 March 2019 Revised date : 3 November 2019 Accepted date : 25 November 2019 Please cite this article as: M. Punjiya, A. Mocker, B. Napier et al., CMOS microcavity arrays for single-cell electroporation and lysis. Biosensors and Bioelectronics (2019), doi: https://doi.org/10.1016/j.bios.2019.111931. This is a PDF file of an article that has undergone enhancements after acceptance, such as the addition of a cover page and metadata, and formatting for readability, but it is not yet the definitive version of record. This version will undergo additional copyediting, typesetting and review before it is published in its final form, but we are providing this version to give early visibility of the article. Please note that, during the production process, errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain. © 2019 Published by Elsevier B.V.

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*Manuscript Click here to view linked References

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Journal Pre-proof *Declaration of Interest Statement

Declaration of interests ☒ The authors declare that they have no known competing financial interests or personal relationships that could have appeared to influence the work reported in this paper.

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☐The authors declare the following financial interests/personal relationships which may be considered as potential competing interests:

Journal Pre-proof *Highlights (for review)

Highlights for CMOS Microcavity Arrays for Single-cell Electroporation and Lysis An array of 28um x 28um microcavities are realized on a CMOS die using without aligned lithography



Microcavities are formed by a deep oxide etch using the available metal routing layers as an etch-stop mask.



Microcavities are suitable for isolation of single-cells.



Etch-stop mask doubles as 3D aligned microcavity electrodes which can be used for electroporation of single cells



On-CMOS electroporation of individual HEK-293 cells is demonstrated and in good agreement with numerical simulation

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Journal Pre-proof *Conflict of Interest

Conflict of Interest

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The author(s) declare no competing interests.

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Journal Pre-proof *Author Contributions Section

Credit Author Statement for “CMOS microcavity arrays for single-cell electroporation and lysis”

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Meera Punjiya: Methodology, Investigation, Formal Analysis, Conceptualization, Writing- Original draft preparation. Andre Mocker: Investigation, Writing- Review and Editing, Resources. Bradley Napier: Investigation, Resources. Arif Zeeshan: Investigation. Martin Gutsche: Supervision. Sameer Sonkusale: Supervision, Conceptualization, Funding Acquisition, Project Administration.