Introduction to microelectronic fabrication

Book reviews

823

INTRODUCTION TO MICROELECTRONIC

FABRICATION

Modular Series on Solid State Devices

EDITORS:

GEROLD W. NEUDECK and ROBERT F. PIERRET

AUTHOR:

RICHARD W. JAEGER

PUBLISHERS:

ADDISON-WESLEY PUBLISHING COMPANY, INC., Reading, Massachusetts,

01867,

United States of America. ISBN 0-201-14695-9.

Published 1988.

There are so many books published on the manufacture of IC's, that one wonders what still another book has to offer.

In this case, the text presents an introduction

to the basic processes common to all [C technologies and provides a base for understanding

more

advanced

through appeal

processing

integrated-circuit to the student with

notes

developed

and the chapter Lithography; position;

headings

student.

The

is

what

can

Lt is

of the intricacies

knowledge

for a course

are as follows of

:-

well

a brief,

and

easily

introducing

cannot read

be

book

of LC's.

students

achieved and

will

it is based

to [C fabrication

An Overview of Microelectronic Fabrication;

Silicon;

and Contacts;

a summary

book

deciding

fabrication.

Oxidation

Interconnections

in

little

Bipolar Process Integration; is

helps

over seven years

Thermal

There

and

Diffusion;

ion Implantation;

Packaging and Yield;

Film De-

MOS Process Integration;

and Answers to Selected Problems. after

each

illustrated

chapter and a series of problems and

will be found useful

of present practice in IC fabrication.

G.W.A.D.

set for the

as a brief summary