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Plating apparatus for x-ray mask fabrication
ELECTROPLATING
IMPROVED
SYSTEM
US. Patent 6284,121. Sept. 4,200l JD. Reid, assignor to Novellus Systems Inc., San Jose, Calif
A system for electroplating a metal onto a surface, the surface having features, the system comprising a bath container filled with a solution containing ions of the metal to be deposited, the surface disposed within the bath container and submerged in the solution, wherein the surface serves as a cathode; an anode disposed within the bath container and submerged in the solution; and a current source coupled to the anode and the surface, wherein the solution includes an additive comprising molecules having a size about equal to or larger than the features’ size so that substantially no molecules of the additive enter the features, the molecules of the additive inhibiting deposition of the metal onto portions of the surface that are accessible to the molecules. ELECTROPLATING
IRON ONTO
ALUMINUM
US. Patent
6,284,123.
JA. Cimermancic assignors
to Briggs
BONDING
OF COPPER
SURFACES
US. Patent 6284,309. Sept. 4,200l C.V Bishop et al., assignors to Atotech
Deutschland
GmbH, Berlin
A method of producing a substrate, which includes preparing a surface capable of making a cocontinuous bond,comprisingthe stepsof applying an etching composition,which comprises an acid, an oxidizing agent, a copper complexing agent selected horn the group consistingofthioureas and imidazole-thiones,and a copper complex wherein the copper complex is presentin an amount,which pm+itates when applied to the copper or copperalloy substrate. POWDER
COATING COMPOSITION
US. Patent
6,284,846.
R.R. Ambrose Zndustries
Sept. 4,200l
et al., assignors
to PPG
Ohio Inc., Cleveland
A powder coating composition comprising a film forming resin system, wherein the resin system comprises a crosslinker component capable of crosslinking a polymeric polyol; and a polymeric polyol component comprising a polyesterpolyol.
Sept. 4,200l
and JJ
Dallman,
& Stratton
Corp.,
Gou)PlASnNG~ US.patent6287,371. Sept. 11,2&U
Milwaukee
E: Gta et al., assignors to LeaRor& Japan
A method for electroplating an iron layer onto an aluminum or aluminum alloy surface from an iron containing anode, comprising a bath of Fe2 having a concentration ranging from 0.65 to 2.5 moles per liter of solution; at least one anion associated with the Fe2 ion; a reducing agent in an amount sufficient to prevent oxidation of Fe2 to Fe3; Cl- in an amount sufficient to promote dissolution of the anode and increase the conductivity of the solution; a wetting agent in an amount sufficient to prevent pitting of an aluminum electroplated surface; and boric acid in a concentration of at least 50 g/L.
Inc, x&y0
Metal Finishing
A nonelectrolyticliquid for gold plating over a metal surface selected from the group consisting of nickel, cobalt, palladium, and a metal alloy containing nickel, cobalt, or palladium, said gold plating liquid comprising a water-soluble gold compound; a complexation agent, which stabilizes a gold ion in the plating liquid, but does not substantially dissolve nickel, cobalt, or palladium; and an antigold deposit agent. PlATNG-#wIxRAY MASKUS. &tent 6287,434. Sept. 11,2001 R.JAckel
An apparatusfor the electmplatingon one side of a substrateimmersedin an electroplatingbath comprisinga tank containingan electrolyte;an anode in the electrolyte;a cathode device of a planardielectricplatehaving an inner surfaceand outer surface;an inhibitor electrodeattachedto the inner surface of the plate; a dielectricclamp ring a cathode structure having a through opening and a lip onto which lip the clamp ring and substrate are positioned;and means to forcethe cathode structure, clamp ring, and secured substrateagainstthe inner surfaceof the plate; and means for supplying a currentto the anode and the cathode deviceto plate the substrate.
US. Rxtent 6287,443. Sept. 11,200l R. Kaufman et al., assignors to Technic Inc, Cmnstorq R.I.
A method of plating and drying an article comprising providing an anode that includes a plurality of peddles; bending at least one peddle to change an electrostatic field formed between the anode and a cathode; providing a shaft for supporting the anode, including an internal channel; and introducing gas through the internal channel for drying the article. CHROMATE-FREE
CONVERSION
COATING
US. Patent P Preikschat Surtec
6,287,704.
Sept. 11, 2001
et al., assignors
Produkte
und System
Oberflachenbehandlung
to fur die
GmbH,
Germany
A conversion layer comprising chromium (III), being a substantially coherent conversion layer on zinc or a zinc alloy, wherein even in the absence of silicate, cerium, aluminum, and borate the conversion layer presents a corrosion protection of 100 to 1,000 hours in the salt spray test.
et al., assignors to Internatio&
Business Machines Corp., Armor&, Nk:
ELECTRODEPOSITABLE
COATING
89
IMPROVED
SYSTEM
US. Patent 6284,121. Sept. 4,200l JD. Reid, assignor to Novellus Systems Inc., San Jose, Calif
A system for electroplating a metal onto a surface, the surface having features, the system comprising a bath container filled with a solution containing ions of the metal to be deposited, the surface disposed within the bath container and submerged in the solution, wherein the surface serves as a cathode; an anode disposed within the bath container and submerged in the solution; and a current source coupled to the anode and the surface, wherein the solution includes an additive comprising molecules having a size about equal to or larger than the features’ size so that substantially no molecules of the additive enter the features, the molecules of the additive inhibiting deposition of the metal onto portions of the surface that are accessible to the molecules. ELECTROPLATING
IRON ONTO
ALUMINUM
US. Patent
6,284,123.
JA. Cimermancic assignors
to Briggs
BONDING
OF COPPER
SURFACES
US. Patent 6284,309. Sept. 4,200l C.V Bishop et al., assignors to Atotech
Deutschland
GmbH, Berlin
A method of producing a substrate, which includes preparing a surface capable of making a cocontinuous bond,comprisingthe stepsof applying an etching composition,which comprises an acid, an oxidizing agent, a copper complexing agent selected horn the group consistingofthioureas and imidazole-thiones,and a copper complex wherein the copper complex is presentin an amount,which pm+itates when applied to the copper or copperalloy substrate. POWDER
COATING COMPOSITION
US. Patent
6,284,846.
R.R. Ambrose Zndustries
Sept. 4,200l
et al., assignors
to PPG
Ohio Inc., Cleveland
A powder coating composition comprising a film forming resin system, wherein the resin system comprises a crosslinker component capable of crosslinking a polymeric polyol; and a polymeric polyol component comprising a polyesterpolyol.
Sept. 4,200l
and JJ
Dallman,
& Stratton
Corp.,
Gou)PlASnNG~ US.patent6287,371. Sept. 11,2&U
Milwaukee
E: Gta et al., assignors to LeaRor& Japan
A method for electroplating an iron layer onto an aluminum or aluminum alloy surface from an iron containing anode, comprising a bath of Fe2 having a concentration ranging from 0.65 to 2.5 moles per liter of solution; at least one anion associated with the Fe2 ion; a reducing agent in an amount sufficient to prevent oxidation of Fe2 to Fe3; Cl- in an amount sufficient to promote dissolution of the anode and increase the conductivity of the solution; a wetting agent in an amount sufficient to prevent pitting of an aluminum electroplated surface; and boric acid in a concentration of at least 50 g/L.
Inc, x&y0
Metal Finishing
A nonelectrolyticliquid for gold plating over a metal surface selected from the group consisting of nickel, cobalt, palladium, and a metal alloy containing nickel, cobalt, or palladium, said gold plating liquid comprising a water-soluble gold compound; a complexation agent, which stabilizes a gold ion in the plating liquid, but does not substantially dissolve nickel, cobalt, or palladium; and an antigold deposit agent. PlATNG-#wIxRAY MASKUS. &tent 6287,434. Sept. 11,2001 R.JAckel
An apparatusfor the electmplatingon one side of a substrateimmersedin an electroplatingbath comprisinga tank containingan electrolyte;an anode in the electrolyte;a cathode device of a planardielectricplatehaving an inner surfaceand outer surface;an inhibitor electrodeattachedto the inner surface of the plate; a dielectricclamp ring a cathode structure having a through opening and a lip onto which lip the clamp ring and substrate are positioned;and means to forcethe cathode structure, clamp ring, and secured substrateagainstthe inner surfaceof the plate; and means for supplying a currentto the anode and the cathode deviceto plate the substrate.
US. Rxtent 6287,443. Sept. 11,200l R. Kaufman et al., assignors to Technic Inc, Cmnstorq R.I.
A method of plating and drying an article comprising providing an anode that includes a plurality of peddles; bending at least one peddle to change an electrostatic field formed between the anode and a cathode; providing a shaft for supporting the anode, including an internal channel; and introducing gas through the internal channel for drying the article. CHROMATE-FREE
CONVERSION
COATING
US. Patent P Preikschat Surtec
6,287,704.
Sept. 11, 2001
et al., assignors
Produkte
und System
Oberflachenbehandlung
to fur die
GmbH,
Germany
A conversion layer comprising chromium (III), being a substantially coherent conversion layer on zinc or a zinc alloy, wherein even in the absence of silicate, cerium, aluminum, and borate the conversion layer presents a corrosion protection of 100 to 1,000 hours in the salt spray test.
et al., assignors to Internatio&
Business Machines Corp., Armor&, Nk:
ELECTRODEPOSITABLE
COATING
89