- Email: [email protected]
Training centre expands
Vacuum N e w s flanges, seals, bellows, adaptors and connectors to meet virtually every vacuum system requirement. Each item is available in differing sizes and materials, all conforming to relevant standards.
Commercial
Colin Wilkinson Balzers High Vacuum Ltd. Northbridge Road, Berkhamsted, Herts HP4 1 EN Tel 04427 21 81
news
Tegal installs first etcher for 8 in. wafers
Training centre expands
Tegal Corporation has installed its first plasma etcher for 200 mm wafers, a 983 silicon dioxide system, for a customer in the Far East. The etcher is part of the tabletop 980 Series introduced at SEMICON West "86 for silicon dioxide, polysilicon, photoresist stripping, descum, and backside etching. The 983 can be used for etching contacts and vias, oxide sidewall spacers, and planarization. Evolved from the 900e Series of modular tabletop etchers, the 980 Series offers equivalent process capability on 200 mm substrates, many common modules, and increased reliability.
Now in its 33rd year the Edwards Vacuum Training Centre has exceeded all expectations since its formation back in the mid-1 950s. More than 15,000 people have attended courses at Crawley--approximately 10% of them coming from overseas--and many thousands more have been trained 'on-site' both in the UK and overseas through special tailor-made courses designed to suit customers' specific requirements.
For particulate control, the 980 Series systems feature an automatic wafer-handling system with a pick-and-place mechanism to transport the wafer from cassette to cassette. Only the backside edge of the wafer contacts the elastomer-coated transport mechanism, minimizing surface friction. Users operate the 980 Series systems through a built-in touch-screen CRT. The touch-screen is designed for operators to select recipes, start and stop the process, and check system operation status. A retractable, Iockable keyboard is used for recipe creation, editing, and diagnostics, and access is protected by password control. A host computer RS232 automation link uses SECS-I and SECS-II protocol. Herb Drake, Director of 900 Operations, noted, "The 980 Series offers demonstrated process capability and reliability, field-proven by the more than 400 units of the 900/900e Series that have been installed since mid-1 984. Essentially, we have scaled the wafer transport size for 200 mm wafers and have built in some of the peripherals, such as the CRT, strip chart recorder; and RF generator.' Complementing the 980 Series, the 900e Series offers similar capabilities for 3 in. to 150 mm wafers.
A vital part of Edwards training courses is 'hands on' experience and the Centre has a laboratory of vacuum equipment which is used to demonstrate the principles learned in theory. To accommodate new product training and the increased practical content of the courses the laboratory area has just been increased by approximately 20%. The demand for on-site training coupled with the need to provide equipment for hands-on experience has resulted in the Centre being equipped with a specially adapted four wheel, 13 cwt trailer. Much of the Centre's vacuum equipment has been duplicated and up to 6.4 m ~ of equipment can be transported and used during on-site training. The number of lecturing staff has been increased and Edwards is now able to offer training on all aspects of instrumentation for vacuum measurement, process control/monitoring and leak detection. Increased demand for courses has resulted in a second lecture room being added to the Centre to allow for the running of parallel sessions. A new brochure which details the courses that will be held at Crawley during 1987 is now available. Edwards High Vacuum International Manor Royal, Crawley, West Sussex RH10 2LW
TegaL founded in 1972 as a supplier of plasma chemistry instruments, produced its first plasma etch and strip equipment in 1975 and became a subsidiary of Motorola in 1977. Membership of Motorola's New Enterprises organization has provided the opportunity for long term investment coupled with an independence of activity. With headquarters in Novato, California. employing over 300 people, Tegal has offices worldwide, including a sales office in Maidenhead and a demonstration and customer support facility in Livingston.
Labour productivity of existing vacuum coating plants is being raised by at least 25% through the use of a new programmable process control unit. Just on the market, it is already in operation on the first customers' plants.
Chris Ridge Tegal Old Court, Cox Green Lane, Cox Green, Maidenhead, Berks SL6 3BH Tel 0628 371 72
The Edwards 2001 programmable logic controller (PLC) incorporated in the system, made by Dibro Ltd, Liverpool, improves productivity by greatly simplifying the process control procedures and reducing the maintenance requirements for operating vacuum coating plants.
62
Programmable control unit raises vacuum coating productivity
Commercial
Colin Wilkinson Balzers High Vacuum Ltd. Northbridge Road, Berkhamsted, Herts HP4 1 EN Tel 04427 21 81
news
Tegal installs first etcher for 8 in. wafers
Training centre expands
Tegal Corporation has installed its first plasma etcher for 200 mm wafers, a 983 silicon dioxide system, for a customer in the Far East. The etcher is part of the tabletop 980 Series introduced at SEMICON West "86 for silicon dioxide, polysilicon, photoresist stripping, descum, and backside etching. The 983 can be used for etching contacts and vias, oxide sidewall spacers, and planarization. Evolved from the 900e Series of modular tabletop etchers, the 980 Series offers equivalent process capability on 200 mm substrates, many common modules, and increased reliability.
Now in its 33rd year the Edwards Vacuum Training Centre has exceeded all expectations since its formation back in the mid-1 950s. More than 15,000 people have attended courses at Crawley--approximately 10% of them coming from overseas--and many thousands more have been trained 'on-site' both in the UK and overseas through special tailor-made courses designed to suit customers' specific requirements.
For particulate control, the 980 Series systems feature an automatic wafer-handling system with a pick-and-place mechanism to transport the wafer from cassette to cassette. Only the backside edge of the wafer contacts the elastomer-coated transport mechanism, minimizing surface friction. Users operate the 980 Series systems through a built-in touch-screen CRT. The touch-screen is designed for operators to select recipes, start and stop the process, and check system operation status. A retractable, Iockable keyboard is used for recipe creation, editing, and diagnostics, and access is protected by password control. A host computer RS232 automation link uses SECS-I and SECS-II protocol. Herb Drake, Director of 900 Operations, noted, "The 980 Series offers demonstrated process capability and reliability, field-proven by the more than 400 units of the 900/900e Series that have been installed since mid-1 984. Essentially, we have scaled the wafer transport size for 200 mm wafers and have built in some of the peripherals, such as the CRT, strip chart recorder; and RF generator.' Complementing the 980 Series, the 900e Series offers similar capabilities for 3 in. to 150 mm wafers.
A vital part of Edwards training courses is 'hands on' experience and the Centre has a laboratory of vacuum equipment which is used to demonstrate the principles learned in theory. To accommodate new product training and the increased practical content of the courses the laboratory area has just been increased by approximately 20%. The demand for on-site training coupled with the need to provide equipment for hands-on experience has resulted in the Centre being equipped with a specially adapted four wheel, 13 cwt trailer. Much of the Centre's vacuum equipment has been duplicated and up to 6.4 m ~ of equipment can be transported and used during on-site training. The number of lecturing staff has been increased and Edwards is now able to offer training on all aspects of instrumentation for vacuum measurement, process control/monitoring and leak detection. Increased demand for courses has resulted in a second lecture room being added to the Centre to allow for the running of parallel sessions. A new brochure which details the courses that will be held at Crawley during 1987 is now available. Edwards High Vacuum International Manor Royal, Crawley, West Sussex RH10 2LW
TegaL founded in 1972 as a supplier of plasma chemistry instruments, produced its first plasma etch and strip equipment in 1975 and became a subsidiary of Motorola in 1977. Membership of Motorola's New Enterprises organization has provided the opportunity for long term investment coupled with an independence of activity. With headquarters in Novato, California. employing over 300 people, Tegal has offices worldwide, including a sales office in Maidenhead and a demonstration and customer support facility in Livingston.
Labour productivity of existing vacuum coating plants is being raised by at least 25% through the use of a new programmable process control unit. Just on the market, it is already in operation on the first customers' plants.
Chris Ridge Tegal Old Court, Cox Green Lane, Cox Green, Maidenhead, Berks SL6 3BH Tel 0628 371 72
The Edwards 2001 programmable logic controller (PLC) incorporated in the system, made by Dibro Ltd, Liverpool, improves productivity by greatly simplifying the process control procedures and reducing the maintenance requirements for operating vacuum coating plants.
62
Programmable control unit raises vacuum coating productivity