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Ion implantation and its application in semiconductor technology
Classified abstracts 1420--1434 used in the metallization of ceramics by molybdenum or tungsten and the wettability of molybdenum surface by glass-forming ceramics containing these additives, is studied. V D Saratovkin, Elektron Tekh Priemno Usilit Lampy, 2, 1970, 53-56
(in Russian). 37 1420. Cryostat for investigation of chemical reactions by the method of matrix isolation. (USSR) Construction of a helium vacuum cryostat for optical investigations of the intermediate products of chemical reactions in an inert gas matrix is described. With gas admission of 3 to 4 retool/hour the pressure increases from 3×10 -7 to 1×10 5 torr in the vacuum chamber. A K Maltsev et al, Prib Tekh Eksper, No 1, 1971,249-251 (in Russian). 37 1421. Low-temperature microbalances with sensitivity of 10 -7 g. (USSR) Construction of microbalances is described which are used for investigation of adsorption processes in highvacuum and low-temperature conditions. V S Kogan et al, Prib Tekh Eksper, No 1, 1971, 245-247 (in Russian). 37 1422. Ion implantation and its application in semiconductor technology. (Germany) The ion implantation technique and its application in semiconductor technology are reviewed. Vacuum equipment for ion implantation is described. Energy losses of ions passing through a crystal are discussed. H J Rohde and S Schwabe, Nachrichtentechn, 21 (4), April 1971, 151155 (in German). 37 1423. Zone melting of CdTe. (USSR) A method of obtaining CdTe single crystals by horizontal zone melting under controlled cadmium vapour pressure in a quartz ampoule evacuated to pressure of 10 ~torr, is described. S V Prokofev, Neorg Mater, 6 (6), 1970, 1077-1080 (in Russian). 37 1424. Behaviour of Pb~_xMnSe solid solutions on heating in vacuum. (USSR) Evaporation of Pbl_xMnSe solid solutions in vacuum is investigated. Compositions of the deposit and of the residual material are determined after heating in vacuum. V G Vanyarkbo et al, Neorg Mater, 6 (7), 1970, 1347 (in Russian). 37 1425. Preparation and some properties of metailoceramic alloys of tungsten and yttrium hexahoride. (USSR) Preparation of metalloceramic alloys of tungsten with yttrium hexaboride is described and their thermionic properties are investigated in vacuum diodes. G A Kudintseva et al, Neorg Mater, 6 (7), 1970, 1335 1336 (in
Russian). 37 1426. Oxidation of antimony and bismuth tellorides (USSR) The oxidation of antimony and bismuth tellurides is investigated in a manometric arrangement. The composition of the oxidation products is determined. Z Boncheva-Mladenova et al, Neorg Mater, 6 (7), 1970, 1264-1267 (in
Russian). 37 1427. Preparation of titanium carbide. (USSR) Equilibrium conditions of the reaction of titanium oxide with carbon are investigated. Preparation of titanium carbide with composition close to stoichiometric in a vacuum furnace at pressure of 1 torr and temperature of 1700°C is described. G A Meerson et al, Neorg Mater, 6 (10), 1970, 1749-1752 (in Russian). 37 1428. Thermoelectric force of CuO and its dependence on oxygen partial pressure. (USSR) Dependence of the thermoelectromotive force of CuO on the oxygen partial pressure is investigated in the range 1 to 760 torr. K P Zuev and V D Dolgintsev, lzv VUZ Fiz, No 2, 1971, 110-112 (in
Russian).
37 1429. Application of electron beams in vacuum systems for melting metals. (Poland) A review of the most common types of electron beam devices designed for vacuum melting and refining of metals is presented. The most commonly used materials for thermionic cathodes and the advantages and disadvantages of various electron guns and electronoptical systems are discussed. Particular melting systems are analyzed. W Barwicz, Prace PIE, 11 (1), 1970, 31-60 (in Polish). 37 : 16 1430. Synthesis and property investigation of crystalline potassium gallium aluminium silicates. (USSR) The conditions of crystallization and the adsorption properties of new forms of zeolites of crystalline potassium gallium aluminium silicates are investigated. It is found that potassium gallium aluminium silicates adsorb water, carbon monoxide and other gases, the molecular size of which does not exceed 5 ~. M A Piontkovskaya et al, Neorg Mater, 6 (6), 1970, 1151-1155 (in
Russian). 37 1431. Method of determining the material damage during prolonged mechanical strength testing in vacuum. (USSR) A method of investigation for metals and alloys in vacuum has been developed which, during prolonged high-temperature tests, allows determination of the initial stage of damage at the first signs of microdefects, long before complete degradation occurs. The method is based on evacuating the hollow sample, heating to a determined temperature, and then mechanical loading. During the tests, massspectrometric analyses of gases in the sample, or pumped from it, are carried out periodically. Depending on the system sensitivity, the recorded gas throughput during the test reveals deep lying cracks and inner microdefects not observable on the sample surface. The deep cracks are detected by the occurrence of molecular flow of inert gases insoluble in the metal and which do not give a diffusion flow. The inner defects are detected by variations in the diffusion flow of gases soluble in metals, for example of hydrogen. The method also permits gas-tightness testing of the envelopes of vacuum devices, under operational conditions. N P Borisov, Zavoclsk Lab, 36 (12), 1970, 1503-1504 (in Russian). 37 1432. Temperature regulation and pressure measurement system for the determination of data on liquid-vapour equilibrium. (Czechoslovakia) A transistor temperature regulator and U-manometer equipped with an expansion loop were constructed as parts of a system for determination of data on isothermal liquid-vapour equilibrium at pressures below barometric pressure. Z Sedlacek et al, Chem Listy, 65 (5), May 1971, 540-544 (in Czech).
IV. Materials and techniques used in vacuum technology 42. GLASS, CERAMICS AND REFRACTORY OXIDES 42 1433. Electrical strength of molybdenum glasses. (USSR) The voltages for surface breakdown of molybdenum glasses, used in the manufacture of electro-vacuum devices, are determined. B D Ryazantsev and M I Staroverov, lzv Leningr Elektrotehn Ins& 94, 1970, 70-72 (in Russian). 45. SOLDERING, WELDING, BRAZING, SOLDERS 45 1434. Adhesion and wetting of hexagonal and cubic BN by molten metals. (USSR) Contact properties and wetting by molten metals of various modifications of BN are investigated in vacuum at 1 to 5 x 10 -5 torr using the sessile drop method. It is found that interaction between BN and molten Sn, In, Ga, Ge and Cu is due to physical forces. Yu V Naydich et al, Neorg Mater, 6 (10). 1970. 1758-1761 (in Russian). 573
(in Russian). 37 1420. Cryostat for investigation of chemical reactions by the method of matrix isolation. (USSR) Construction of a helium vacuum cryostat for optical investigations of the intermediate products of chemical reactions in an inert gas matrix is described. With gas admission of 3 to 4 retool/hour the pressure increases from 3×10 -7 to 1×10 5 torr in the vacuum chamber. A K Maltsev et al, Prib Tekh Eksper, No 1, 1971,249-251 (in Russian). 37 1421. Low-temperature microbalances with sensitivity of 10 -7 g. (USSR) Construction of microbalances is described which are used for investigation of adsorption processes in highvacuum and low-temperature conditions. V S Kogan et al, Prib Tekh Eksper, No 1, 1971, 245-247 (in Russian). 37 1422. Ion implantation and its application in semiconductor technology. (Germany) The ion implantation technique and its application in semiconductor technology are reviewed. Vacuum equipment for ion implantation is described. Energy losses of ions passing through a crystal are discussed. H J Rohde and S Schwabe, Nachrichtentechn, 21 (4), April 1971, 151155 (in German). 37 1423. Zone melting of CdTe. (USSR) A method of obtaining CdTe single crystals by horizontal zone melting under controlled cadmium vapour pressure in a quartz ampoule evacuated to pressure of 10 ~torr, is described. S V Prokofev, Neorg Mater, 6 (6), 1970, 1077-1080 (in Russian). 37 1424. Behaviour of Pb~_xMnSe solid solutions on heating in vacuum. (USSR) Evaporation of Pbl_xMnSe solid solutions in vacuum is investigated. Compositions of the deposit and of the residual material are determined after heating in vacuum. V G Vanyarkbo et al, Neorg Mater, 6 (7), 1970, 1347 (in Russian). 37 1425. Preparation and some properties of metailoceramic alloys of tungsten and yttrium hexahoride. (USSR) Preparation of metalloceramic alloys of tungsten with yttrium hexaboride is described and their thermionic properties are investigated in vacuum diodes. G A Kudintseva et al, Neorg Mater, 6 (7), 1970, 1335 1336 (in
Russian). 37 1426. Oxidation of antimony and bismuth tellorides (USSR) The oxidation of antimony and bismuth tellurides is investigated in a manometric arrangement. The composition of the oxidation products is determined. Z Boncheva-Mladenova et al, Neorg Mater, 6 (7), 1970, 1264-1267 (in
Russian). 37 1427. Preparation of titanium carbide. (USSR) Equilibrium conditions of the reaction of titanium oxide with carbon are investigated. Preparation of titanium carbide with composition close to stoichiometric in a vacuum furnace at pressure of 1 torr and temperature of 1700°C is described. G A Meerson et al, Neorg Mater, 6 (10), 1970, 1749-1752 (in Russian). 37 1428. Thermoelectric force of CuO and its dependence on oxygen partial pressure. (USSR) Dependence of the thermoelectromotive force of CuO on the oxygen partial pressure is investigated in the range 1 to 760 torr. K P Zuev and V D Dolgintsev, lzv VUZ Fiz, No 2, 1971, 110-112 (in
Russian).
37 1429. Application of electron beams in vacuum systems for melting metals. (Poland) A review of the most common types of electron beam devices designed for vacuum melting and refining of metals is presented. The most commonly used materials for thermionic cathodes and the advantages and disadvantages of various electron guns and electronoptical systems are discussed. Particular melting systems are analyzed. W Barwicz, Prace PIE, 11 (1), 1970, 31-60 (in Polish). 37 : 16 1430. Synthesis and property investigation of crystalline potassium gallium aluminium silicates. (USSR) The conditions of crystallization and the adsorption properties of new forms of zeolites of crystalline potassium gallium aluminium silicates are investigated. It is found that potassium gallium aluminium silicates adsorb water, carbon monoxide and other gases, the molecular size of which does not exceed 5 ~. M A Piontkovskaya et al, Neorg Mater, 6 (6), 1970, 1151-1155 (in
Russian). 37 1431. Method of determining the material damage during prolonged mechanical strength testing in vacuum. (USSR) A method of investigation for metals and alloys in vacuum has been developed which, during prolonged high-temperature tests, allows determination of the initial stage of damage at the first signs of microdefects, long before complete degradation occurs. The method is based on evacuating the hollow sample, heating to a determined temperature, and then mechanical loading. During the tests, massspectrometric analyses of gases in the sample, or pumped from it, are carried out periodically. Depending on the system sensitivity, the recorded gas throughput during the test reveals deep lying cracks and inner microdefects not observable on the sample surface. The deep cracks are detected by the occurrence of molecular flow of inert gases insoluble in the metal and which do not give a diffusion flow. The inner defects are detected by variations in the diffusion flow of gases soluble in metals, for example of hydrogen. The method also permits gas-tightness testing of the envelopes of vacuum devices, under operational conditions. N P Borisov, Zavoclsk Lab, 36 (12), 1970, 1503-1504 (in Russian). 37 1432. Temperature regulation and pressure measurement system for the determination of data on liquid-vapour equilibrium. (Czechoslovakia) A transistor temperature regulator and U-manometer equipped with an expansion loop were constructed as parts of a system for determination of data on isothermal liquid-vapour equilibrium at pressures below barometric pressure. Z Sedlacek et al, Chem Listy, 65 (5), May 1971, 540-544 (in Czech).
IV. Materials and techniques used in vacuum technology 42. GLASS, CERAMICS AND REFRACTORY OXIDES 42 1433. Electrical strength of molybdenum glasses. (USSR) The voltages for surface breakdown of molybdenum glasses, used in the manufacture of electro-vacuum devices, are determined. B D Ryazantsev and M I Staroverov, lzv Leningr Elektrotehn Ins& 94, 1970, 70-72 (in Russian). 45. SOLDERING, WELDING, BRAZING, SOLDERS 45 1434. Adhesion and wetting of hexagonal and cubic BN by molten metals. (USSR) Contact properties and wetting by molten metals of various modifications of BN are investigated in vacuum at 1 to 5 x 10 -5 torr using the sessile drop method. It is found that interaction between BN and molten Sn, In, Ga, Ge and Cu is due to physical forces. Yu V Naydich et al, Neorg Mater, 6 (10). 1970. 1758-1761 (in Russian). 573