Three new valves from VAT vacuum products 1. VAT have recently announced 3 new valves

Vacuum

News

a high-stability

STM

4.6 K. The system computer

and a go-liter

full image acquisition

analysis,

information

of lateral

electronics,

include

image

Further

2.5 microns

control

workstation,

capabilities storage,

head with

includes

helium

storage

under

and l/V spectroscopy

Three

scan range at

a color

dewar.

computer

Software control,

data

1 .I. Mini

uhv gate

and gas analysis

(CITS). Tim Van Slambrouck Park Scientific

Instruments

476

Ellis Street

Mountain

View

CA 94043 USA Tel 415 965 2976 Fax 415 965 2946

valve.

with

position,

by-pass

valves

valve

can be opened

pass valves

The new direct

Manual

valve series 01 is available

plasmas.

Applications

research

and development.

deposition process

or negative

are found

is the integral the inherent

Box device ion source, research Further

which

is for the from

or damage

of

energy

engineers

analyser, seeking

sealed

a CMA

optics,

which

design

or Bessel

an electron

quadrupole

package.

cycle

impact

mass filter

body

and

tight

understandmg

of

: Hiden

Analytical

Europa

Gemini

Business

Warrington

Ltd

Boulevard WA5

Park 5TN

Tel 0925

445225

Fax 0925

416518

with

in the by-

the specific

pressure

actuation

is available

This compact

for

uhv gate

with

gate valves

up to

the innovative

This new gate valve without

mechanism

friction

and the

free.

shock,

valves

feature

a short

and a guaranteed

closures.

‘MONOVAT’

rectangular

against

gate valves

closing

time,

maintenance-free valves

are

atmosphere.

are available

with

the renowned

gate

Very large rectangular

configuration.

large

rectangular

VATLOCK

features

by-pass

CF 40 flanges.

and are leak-tight

sealing

valve.

Maintenance

mm are available

configuration.

a very smooth

life. The guaranteed

with

the

The new VATLOCK

valve operation

and a greatly

maintenance-free

cycle

can be performed

increased

life is 100,000

without

removing

the valve

from the system. with

rectangular

and against

The valve shown valve,

231

valves.

rectangular

valves

cleaning,

2. Pump-out pumped featuresa

Valve vessels,

opening IS connected

an easy to use clamp required,

and is then

valve system pressure

System.

bellows-sealed

unintentional The valve

pumping.

even in a heavily

Ltd is the Pump-out vacuum

comes

sealed.

They

are leak-

for very long process

System

relief valve which

The design that prevents

cover for the pump-out port on the storage

of the vacuum

and replaced

is built

for infrequently

vessels.

a magneticcoupling

to the pump-out removed

intervals

VAT Vacuum

suitable

storage

and a protective

in four sizes:

from

the

sealed

This allows

mechanism,

pumping

is double

contaminating

Available Valve

application.

body for cleaning

The valve

e.g. cryogenic

when

for a specific

of the valve

of substrates.

a port for differential

Products

optimized

at the bottom

e.g. after breakage

between

are bellows

atmosphere.

is a design

There are openings from

to match

is

1 i”).

In the closed

The orifices

up to a size of 500 mm x 1500

VATLOCK

The EQP is for

an Improved

particle

sealing

Very

closures.

ion extraction electronics

of 500,000

improved

analyser

of matching

lifetime

gate valves

gives the EQP its

closed.

reduction.

part. The gate moves

or opening

bellows

1.3.

probability

process.

information

are virtually

VATLOCK

of

tight

no 2, or both

configuration.

Larger rectangular

processing

distributions

mass filter.

energy

controlled

or process

plasma

detection

45” electrostatic

includes

electrostatic

microcomputer

sealing

one moving

DN 40 (I.D.

valve

mm are available

Large ‘MONOVAT’

or neutrals

in all areas of plasma

disadvantages

to a quadrupole

The EQP system

Probe

can be used for the identification

end point

The key component

performance eliminates

Plasma

ions, radicals

The mass and energy

or etch products contaminants,

assessment.

their

Quadrupole

of positive

or vacuum

and pneumatic

with

at base pressure

(e.g. up to 1 mbar)

1.2. Rectangular gate valves. Rectangular

no closing

EQP Electrostatic

analysis

Hiden

open

no 1, by-pass

the uhv gate valve and the by-pass

valves

from

gas analysis

pressures

exchangeable

range to be analysed.

has only

Probe

Residual

for pressure

are easily

‘MONOVAT’

Quadrupole

Products

this new uhv gate valve

The gate valve can be fully

a size of 152 mmx762

New Electrostatic Analytical

VAT Vacuum

at high operating

easily accomplished

:

from

new valves from

1. VAT have recently announced 3 new valves

graphics

vessel

by

is

by a protective

DN 25, 40,63

port. vessel

cover.

The

and 100 mm. A

into the pump-out

port is also

available. Further

information

from

: Robert VAT Vacuum 235

G White

Products

Regents

Ltd

Park Road Finchley

London

New model 340 Ionization Granville-Phillips New EQP from Hiden Analytical.

The 340

Ionization

vacuum

measurement

Gauge

Gauge

Controller

applications

(IGC)

1999

Fax 081 343

1104

Controller helps reduce

by providing

N3 3LG

Tel 081 346

from costs

dependable,

in

trouble